Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

Chung Ming Wang*, Chia Hao Kuo, Horng-Chih Lin, Tiao Yuan Huang

*Corresponding author for this work

研究成果: Conference contribution同行評審

摘要

In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.

原文English
主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
出版狀態Published - 26 九月 2011
事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
持續時間: 21 六月 201124 六月 2011

出版系列

名字Proceedings - International NanoElectronics Conference, INEC
ISSN(列印)2159-3523

Conference

Conference4th IEEE International Nanoelectronics Conference, INEC 2011
國家Taiwan
城市Tao-Yuan
期間21/06/1124/06/11

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