Enhancing Performance in Thin Tilm Transistors with Vacuum or Solution Processed Amorphous Oxide Semiconductors Towards Display Applications

ChangDong Chen, GongTan Li, MinMin Li, Bo-Ru Yang, Chuan Liu, Chia Yu Lee, Yuan Chun Wu, Po-Yen Lu, Han-Ping Shieh

研究成果: Conference contribution同行評審

摘要

To simultaneously achieve high mobility and good reliability of thin-film transistors (TFTs), we controlled oxygen vacancies via nitrogen incorporation in InGaZnO TFTs from vacuum-or solution-based methods. For display applications, IGZO and crystalline silicon TFTs were integrated together to build hybrid CMOS. Also, additive patterning method is developed for solution-processed oxide semiconductors, based on which wafer-scale TFT arrays and NMOS have been demonstrated.
原文English
主出版物標題 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
頁面237-240
頁數4
DOIs
出版狀態Published - 2018

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