Electrical properties of metal-ferroelectric-insulator-semiconductor using sol-gel derived SrBi2Ta2O9 film and ultra-thin Si3N4 buffer layer

Chia Hsing Huang, Tseung-Yuen Tseng*, Chao-Hsin Chien, Ming Jui Yang, Ching Chich Leu, Ting Chang Chang, Po-Tsun Liu, Tiao Yuan Huang

*Corresponding author for this work

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)


The electrical properties of the metal-ferroelectric-insulator-silicon memories with stacked gate configuration of Pt/SrBi2Ta2O9 (SBT)/Si3N4/p-Si (100) were investigated. In an attempt to operate at low voltage with sufficient large memory window, various ultra-thin Si3N4 buffer layers in thickness of 3.5, 2, and 0.9 nm were employed. From the results of C-V measurements, the memory window can be as large as 0.8 V at the bias amplitude of 5 V for the sample with 0.9 nm SixNy buffer layer. Well-crystallized perovskite structures have been further confirmed by the spectra of X-ray diffraction measurements. The leakage current, which plays a very important role in the data retention, of Pt/SBT (245 nm)/Si3N4 (0.9 nm)/p-Si (100) can be as low as 2.5 × 10-8 A/cm2 at 200 kV/cm. Excellent fatigue-free performance with up to 1010 read/write cycles and good retention time of >2 h have been obtained. Optimization and scaling of SBT thin films are believed to be effective in pursuing extremely low voltage operation, high-density and liable 1T nonvolatile ferroelectric random access memories.

頁(從 - 到)377-381
期刊Thin Solid Films
出版狀態Published - 2 十二月 2002

指紋 深入研究「Electrical properties of metal-ferroelectric-insulator-semiconductor using sol-gel derived SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub> film and ultra-thin Si<sub>3</sub>N<sub>4</sub> buffer layer」主題。共同形成了獨特的指紋。