Dual-stage piezoelectric nano-positioner utilizing a range-extended optical fiber Fabry-Perot interferometer

Shao-Kang Hung*, En Te Hwu, Mei Yung Chen, Li Chen Fu

*Corresponding author for this work

研究成果: Article同行評審

17 引文 斯高帕斯(Scopus)

摘要

This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry.

原文English
頁(從 - 到)291-298
頁數8
期刊IEEE/ASME Transactions on Mechatronics
12
發行號3
DOIs
出版狀態Published - 1 六月 2007

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