Development of absolutely radiant flux measurements with electrical calibrated microbolometer

Kuan Chou Hou*, Yang-Mang Ou, Jin-Chern Chiou

*Corresponding author for this work

研究成果: Conference contribution同行評審

摘要

Absolutely flux radiometer measurements was developed with a microbolometer by using MEMS technology including lithography and etching. The radiometer is calibrated with electrical energy and adopted for absolute power and temperature drift, the sensor is called electric calibrated micro bolometer (ECμB). Platinum is utilized to be a heater and a sensor at different layer, other electric isolation layers were used to separate signal from those two platinum layers. Those layers were integrated and constructed in a membrane which was formed by using TMAH etching solution. Accuracy of radiometer was identified that is proportional to ratio of electrical substitution power and radiant flux was measured with development of ECμB.

原文English
主出版物標題2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
頁面1464-1467
頁數4
DOIs
出版狀態Published - 25 八月 2011
事件2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China
持續時間: 10 五月 201112 五月 2011

出版系列

名字Conference Record - IEEE Instrumentation and Measurement Technology Conference
ISSN(列印)1091-5281

Conference

Conference2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
國家China
城市Binjiang, Hangzhou
期間10/05/1112/05/11

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