Dependence of polarization on temperature coefficient resistance of (Ba,Sr)TiO3 thin films post-treated by RTA

Der Chi Shye; Bi Shiou Chiou; Meng Wei Kuo; Jyh Shin Chen; Bruce C.S. Chou; Chueh Kuei Jan; Mei Fang Wu; Huang-Chung Cheng

doi:10.1149/1.1553937

Dependence of polarization on temperature coefficient resistance of (Ba,Sr)TiO₃ thin films post-treated by RTA

Der Chi Shye^*, Bi Shiou Chiou, Meng Wei Kuo, Jyh Shin Chen, Bruce C.S. Chou, Chueh Kuei Jan, Mei Fang Wu, Huang-Chung Cheng

^*Corresponding author for this work

電子工程學系

研究成果: Article › 同行評審

10 引文斯高帕斯（Scopus）

摘要

The temperature coefficient of resistance (TCR) characteristics of Pt/(Ba_0.8Sr_0.2)TiO₃ (BST)/Pt thin-film resistors are studied for the BST films with rapid thermal annealing (RTA) treatments. The polarizations induced by bias voltages greatly influence the TCR characteristics. The RTA-treated BST thin film exhibits negative TCR (NTCR) behavior at a negative voltage, but, intriguingly, positive TCR (PTCR) behavior at a positive voltage. According to the leakage current analysis, Schottky emission dominates the negatively biased current at the upper interface, but Heywang barrier scattering confines the positive biased current.

原文	English
期刊	Electrochemical and Solid-State Letters
卷	6
發行號	4
DOIs	https://doi.org/10.1149/1.1553937
出版狀態	Published - 1 四月 2003

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10.1149/1.1553937

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引用此

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abstract = "The temperature coefficient of resistance (TCR) characteristics of Pt/(Ba0.8Sr0.2)TiO3 (BST)/Pt thin-film resistors are studied for the BST films with rapid thermal annealing (RTA) treatments. The polarizations induced by bias voltages greatly influence the TCR characteristics. The RTA-treated BST thin film exhibits negative TCR (NTCR) behavior at a negative voltage, but, intriguingly, positive TCR (PTCR) behavior at a positive voltage. According to the leakage current analysis, Schottky emission dominates the negatively biased current at the upper interface, but Heywang barrier scattering confines the positive biased current.",

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AU - Shye, Der Chi

AU - Chiou, Bi Shiou

AU - Kuo, Meng Wei

AU - Chen, Jyh Shin

AU - Chou, Bruce C.S.

AU - Jan, Chueh Kuei

AU - Wu, Mei Fang

AU - Cheng, Huang-Chung

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