CMOS-MEMS based optical phase shifter array with high fill factor

Jin-Chern Chiou, C. C. Hung, L. J. Shieh, Z. L. Tsai

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

The proposed CMOS-MEMS optical phase shifter activates λ/4 vertical displacement with 3V driving voltages and achieves the mirror deformation within λ/10. The fill factor is 90% without the need of flip-chip bonding technology.

原文American English
主出版物標題2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
頁面115-116
頁數2
DOIs
出版狀態Published - 16 十二月 2009
事件2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
持續時間: 17 八月 200920 八月 2009

出版系列

名字2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Conference

Conference2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
國家United States
城市Clearwater, FL
期間17/08/0920/08/09

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