Characterization of (Ba,Sr)TiO3 thin-film capacitors with Ir bottom electrodes and its improvement by plasma treatment

Dong Sing Wuu*, Ray-Hua Horng, Chin Ching Lin, Yan Hong Liu

*Corresponding author for this work

研究成果: Conference article同行評審

7 引文 斯高帕斯(Scopus)

指紋 深入研究「Characterization of (Ba,Sr)TiO<sub>3</sub> thin-film capacitors with Ir bottom electrodes and its improvement by plasma treatment」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy