Assembly of 3D MEMS mirrors and scanners using compliant push pads

Yi Chiu, Yan Ting Wu, Hao-Chiao Hong

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

指紋 深入研究「Assembly of 3D MEMS mirrors and scanners using compliant push pads」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science