Assembly of 3D MEMS mirrors and scanners using compliant push pads

Yi Chiu, Yan Ting Wu, Hao-Chiao Hong

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.

原文English
主出版物標題Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
頁面27-28
頁數2
DOIs
出版狀態Published - 1 十二月 2013
事件2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
持續時間: 18 八月 201322 八月 2013

出版系列

名字International Conference on Optical MEMS and Nanophotonics
ISSN(列印)2160-5033
ISSN(電子)2160-5041

Conference

Conference2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
國家Japan
城市Kanazawa
期間18/08/1322/08/13

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