This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.
|主出版物標題||Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings|
|出版狀態||Published - 1 十二月 2013|
|事件||2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan|
持續時間: 18 八月 2013 → 22 八月 2013
|名字||International Conference on Optical MEMS and Nanophotonics|
|Conference||2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013|
|期間||18/08/13 → 22/08/13|