Application of supercritical C O2 fluid for dielectric improvement of Si Ox film

Chih Tsung Tsai, Ting Chang Chang*, Po-Tsun Liu, Yi Li Cheng, Kon Tsu Kin, Fon Shan Huang

*Corresponding author for this work

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9 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy