An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run

Kelvin Yih Yuh Doong*, Sunnys Hsieh, S. C. Lin, L. J. Hung, Robin J. Wang, Binson Shen, J. W. Hisa, Jyh-Chyurn Guo, I. C. Chen, K. L. Young, Charles Ching Hsiang Hsu

*Corresponding author for this work

研究成果: Paper同行評審

2 引文 斯高帕斯(Scopus)

摘要

A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

原文English
頁面55-59
頁數5
DOIs
出版狀態Published - 1 十二月 2002
事件Proceedings of The 2002 International Conference on Microelectronic Test Structures - Cork, Ireland
持續時間: 8 四月 200211 四月 2002

Conference

ConferenceProceedings of The 2002 International Conference on Microelectronic Test Structures
國家Ireland
城市Cork
期間8/04/0211/04/02

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