An ANN approach for modeling the multisource yield learning process with semiconductor manufacturing as an example

研究成果: Article

1 引文 斯高帕斯(Scopus)

摘要

Estimating the future yield of a product is a crucial task for semiconductor manufacturers. However, existing methods cannot differentiate the effects of various sources of yield improvement. To address this concern, this study proposes an innovative approach for modeling the yield learning process of a semiconductor product with artificial neural networks, which enable separating the effects of various sources of yield learning. Two real cases were used to demonstrate the effectiveness of the proposed methodology.

原文English
頁(從 - 到)98-104
頁數7
期刊Computers and Industrial Engineering
103
DOIs
出版狀態Published - 1 一月 2017

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