Advanced confocal microscopy for rapid nanoscale topography of surfaces

Chi Sheng Hsieh, Guan Yu Zhuo, Ming Che Chan*

*Corresponding author for this work

研究成果: Conference contribution同行評審

摘要

An advanced confocal microscope with nanoscale depth resolutions and the capability for rapid capture of 3D surface topography was presented. The proposed microscope shows great promise for optical testing of electronic or photonic elements.

原文English
主出版物標題Freeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)
發行者Optical Society of America (OSA)
ISBN(電子)9781943580606
DOIs
出版狀態Published - 3 六月 2019
事件Freeform Optics, Freeform 2019 - Part of Optical Design and Fabrication 2019 - Washington, United States
持續時間: 12 六月 201912 六月 2019

出版系列

名字Freeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)

Conference

ConferenceFreeform Optics, Freeform 2019 - Part of Optical Design and Fabrication 2019
國家United States
城市Washington
期間12/06/1912/06/19

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