@inproceedings{d1a6f2fb903c49ab9b6156ac0710650e,
title = "Advanced confocal microscopy for rapid nanoscale topography of surfaces",
abstract = "An advanced confocal microscope with nanoscale depth resolutions and the capability for rapid capture of 3D surface topography was presented. The proposed microscope shows great promise for optical testing of electronic or photonic elements.",
author = "Hsieh, {Chi Sheng} and Zhuo, {Guan Yu} and Chan, {Ming Che}",
year = "2019",
month = jun,
day = "3",
doi = "10.1364/FREEFORM.2019.JT5A.18",
language = "English",
series = "Freeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)",
publisher = "Optical Society of America (OSA)",
booktitle = "Freeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)",
note = "null ; Conference date: 12-06-2019 Through 12-06-2019",
}