A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling

Bruce C.S. Chou*, Yeong Maw Chen, Yang-Mang Ou, Jin Shown Shie

*Corresponding author for this work

研究成果: Article同行評審

44 引文 斯高帕斯(Scopus)


A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10-7 torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.

頁(從 - 到)273-277
期刊Sensors and Actuators, A: Physical
出版狀態Published - 1 一月 1996

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