A Robust fully-integrated digital-output inductive CMOS-MEMS accelerometer with improved inductor quality factor

Yi Chiu*, Hsuan Wu Liu, Hao Chiao Hong

*Corresponding author for this work

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指紋 深入研究「A Robust fully-integrated digital-output inductive CMOS-MEMS accelerometer with improved inductor quality factor」主題。共同形成了獨特的指紋。

Engineering & Materials Science