A novel large displacement electrostatic actuator: Pre-stress comb-drive actuator

Jin-Chern Chiou*, Y. J. Lin

*Corresponding author for this work

研究成果: Article同行評審

32 引文 斯高帕斯(Scopus)

指紋 深入研究「A novel large displacement electrostatic actuator: Pre-stress comb-drive actuator」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science