A low-stress trench isolation structure and its electrical characteristics of sub 20 ps high-speed ECL

S. Matsuda, N. Itoh, H. Nakajima, K. Inou, T. Iinuma, C. Yoshino, Y. Tsuboi, Y. Katsumata, H. Iwai, H. Hara

研究成果: Conference article

原文English
文章編號760251
頁(從 - 到)73-74
頁數2
期刊Digest of Technical Papers - Symposium on VLSI Technology
DOIs
出版狀態Published - 1993
事件1993 13th Symposium on VLSI Technology, VLSIT 1993 - Kyoto, Japan
持續時間: 17 五月 199319 五月 1993

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