A look-ahead fuzzy back propagation network for lot output time series prediction in a wafer fab

Tin-Chih Chen*

*Corresponding author for this work

研究成果: Conference contribution同行評審

20 引文 斯高帕斯(Scopus)

摘要

Lot output time series is one of the most important time series data in a wafer fab (fabrication plant). Predicting the output time of every lot is there-fore a critical task to the wafer fab. To further enhance the effectives and efficiency of wafer lot output time prediction, a look-ahead fuzzy back propagation network (FBPN) is constructed in this study with two advanced features: the future release plan of the fab is considered (look-ahead); expert opinions are incorporated. Production simulation is also applied in this study to generate test examples. According to experimental results, the prediction accuracy of the look-ahead FBPN was significantly better than those of four existing approaches: multiple-factor linear combination (MFLC), BPN, case-based reasoning (CBR), and FBPN without look-ahead, by achieving a 12%∼37% (and an average of 19%) reduction in the root-mean-squaredor (RMSE) over the comparison basis - MFLC.

原文English
主出版物標題Neural Information Processing - 13th International Conference, ICONIP 2006, Proceedings
發行者Springer Verlag
頁面974-982
頁數9
ISBN(列印)3540464840, 9783540464846
DOIs
出版狀態Published - 1 一月 2006
事件13th International Conference on Neural Information Processing, ICONIP 2006 - Hong Kong, China
持續時間: 3 十月 20066 十月 2006

出版系列

名字Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
4234 LNCS - III
ISSN(列印)0302-9743
ISSN(電子)1611-3349

Conference

Conference13th International Conference on Neural Information Processing, ICONIP 2006
國家China
城市Hong Kong
期間3/10/066/10/06

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