A hybrid intelligent approach for output projection in a semiconductor fabrication plant

Tin-Chih Chen*, Yi Chi Wang

*Corresponding author for this work

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

A hybrid intelligent approach is proposed which can be used to estimate the output of each product type in a semiconductor fabrication plant. This is a critical task for plant operation. First, the hybrid fuzzy-c-means (FCM) and fuzzy-back-propagation-neural-network (FBPN) approach is applied to estimate the output time for every job in the plant. Subsequently, the fuzzy output projection function (FOPF) is proposed to project the outputs into each future time period. To evaluate the advantages and/or disadvantages of the hybrid intelligent approach, a simulated semiconductor plant model is also used in this study to generate test data. From the experimental results, the output projection accuracy by the hybrid intelligent approach was significantly better than that of some existing approaches.

原文English
頁(從 - 到)129-144
頁數16
期刊Intelligent Data Analysis
12
發行號1
DOIs
出版狀態Published - 22 九月 2008

指紋 深入研究「A hybrid intelligent approach for output projection in a semiconductor fabrication plant」主題。共同形成了獨特的指紋。

引用此