A hybrid ANN-FIR system for lot output time prediction and achievability evaluation in a wafer fab

Tin-Chih Chen*

*Corresponding author for this work

研究成果: Chapter同行評審

摘要

A hybrid artificial neural network (ANN)-fuzzy inference rules (FIR) system is constructed in this study for lot output time prediction and achievability evaluation in a fabrication plant (wafer fab), which are critical tasks to the wafer fab. At first, a hybrid and recurrent ANN, i.e. self-organization map (SOM) and fuzzy back propagation network (FBPN), is proposed to predict the output time of a wafer lot. According to experimental results, the prediction accuracy of the hybrid ANN was significantly better than those of some existing approaches. Subsequently, a set of fuzzy inference rules is established to evaluate the achievability of an output time forecast.

原文English
主出版物標題Analysis and Design of Intelligent Systems using Soft Computing Techniques
編輯Patricia Melin, Eduardo Gomez Ramirez, Janusz Kacprzyk, Witold Pedrycz
頁面236-245
頁數10
DOIs
出版狀態Published - 1 十二月 2007

出版系列

名字Advances in Soft Computing
41
ISSN(列印)1615-3871
ISSN(電子)1860-0794

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