A fiber-optic reflective displacement micrometer

Wen H. Ko*, Kow-Ming Chang, Gwo Jen Hwang

*Corresponding author for this work

研究成果: Article同行評審

40 引文 斯高帕斯(Scopus)


A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV μm−1 and a resolution as low as 0.01 μm is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair (A and B) of identical receiving fibers and photodetectors that detects the light reflected from the surface being measured. The differential signal (A − B) of the detectors is proportional to the displacement of the surface relative to a null position. The light intensity variation of the source and the reflectance change of the surface are compensated when the (A − B) signal is divided by the sum (A + B). The resolution is limited by noise and interference (vibration of the base). A resolution of 0.01 μm can be achieved at narrow signal bands (d.c. to 3 Hz) excluding the low-frequency noise and vibration. The range, sensitivity and non-linearity can be adjusted according to the theory. The micrometer offers the advantages of non-contact, no electrical interference, simplicity, low cost and portability. It can be used in medical experiments and laboratory instruments.

頁(從 - 到)51-55
期刊"Sensors and Actuators, A: Physical"
出版狀態Published - 六月 1995

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