60nm planarized ultra-thin body solid phase epitaxy MOSFETs

Peiqi Xuan*, Jakub Kedzierski, Vivek Subranmanian, Jeffrey Bokor, Tsu Jae King, Chen-Ming Hu

*Corresponding author for this work

研究成果: Paper同行評審

6 引文 斯高帕斯(Scopus)

摘要

Several 60nm planarized SPEFETs with excellent performance are presented and presented. For demonstration purposes, the characterization of both one side and two sides crystallization on the channel film is discussed.

原文English
頁面67-68
頁數2
DOIs
出版狀態Published - 1 一月 2000
事件58th Device Research Conference (58th DRC) - Denver, CO, USA
持續時間: 19 六月 200021 六月 2000

Conference

Conference58th Device Research Conference (58th DRC)
城市Denver, CO, USA
期間19/06/0021/06/00

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