ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

Tsu Chi Chang, Kuo Bin Hong, Ying Yu Lai, Yu Hsun Chou, Shing Chung Wang, Tien-chang Lu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.

Original languageEnglish
Article number319
JournalNanoscale Research Letters
Issue number1
StatePublished - 1 Dec 2016


  • Focus ion beam
  • Microcavity
  • Microdisk
  • Whispering gallery mode
  • ZnO

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