XPS study of the bonding properties of lanthanum oxide/silicon interface with a trace amount of nitrogen incorporation

H. Wong*, H. Iwai, K. Kakushima, B. L. Yang, P. K. Chu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Fingerprint Dive into the research topics of 'XPS study of the bonding properties of lanthanum oxide/silicon interface with a trace amount of nitrogen incorporation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science