Widely tunable micromachined optical filter with adjustable tuning characteristics

Chien-Chung Lin*, J. Fu, Jr Harris J.S.

*Corresponding author for this work

Research output: Contribution to journalConference article


A tunable optical filter with a top distributed Bragg refelctor (DBR) structure of Al2O3/GaAs was designed. The surface profile and mechanical properties of the device were tested using a Zygo NewView 5000 interferometer. The mechanical and optical measurements demonstrated the realization of a narrow linewidth, broad tuning range and low-tuning voltage.

Original languageEnglish
Pages (from-to)298-299
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1 Dec 2001
Event14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, United States
Duration: 11 Nov 200115 Nov 2001

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