Widely tunable Al2O3-GaAs DBR filters with variable tuning characteristics

Chien-Chung Lin*, Junxian Fu, James S. Harris

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

We demonstrate an optical tunable filter using Al2O 3-GaAs layers as the top distributed Bragg reflector mirror. The mechanical properties and spectral response versus voltage are characterized. The tuning characteristics can be changed by removing the tensile-stressed Si3N4 on the mirror and legs. An integrated optical-mechanical model is used to analyze the result. Axial nitride and initial residual stress are incorporated into the model to obtain accurate fit. A 64-nm tuning range with 12-V tuning voltage is measured, a significant improvement over previous designs.

Original languageEnglish
Pages (from-to)614-621
Number of pages8
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume10
Issue number3
DOIs
StatePublished - 1 May 2004

Keywords

  • Fabry-Pérot interferometers
  • Mechanical model
  • Microelectromechanical devices
  • Optical device fabrication
  • Plasma material-processing application
  • Tunable filters

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