Wideband Air-Coupled CMUT Arrays for Acoustic Micro-Tapping

Zachary A. Coutant, Oluwafemi Adelegan, Ali Onder Biliroglu, Geng Shi Jeng, John J. Pitre, Mitchell A. Kirby, Ivan Pelivanov, Feysel Yalcin Yamaner, Matthew O'Donnell, Omer Oralkan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure of 950 Pa at the center frequency of 1.45 MHz. The 3-dB, 6-dB, and 10-dB fractional bandwidths are 5%, 10%, and 12.8%.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
StatePublished - 7 Sep 2020
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 7 Sep 202011 Sep 2020

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas


  • Acoustic Micro-Tapping
  • Air Coupled Transducers
  • CMUT

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