Wavefront-based pixel inversion algorithm for generation of subresolution assist features

Jue Chin Yu*, Peichen Yu, Hsueh Yung Chao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

The generation of subresolution assist features (SRAFs) using inverse-lithography techniques demands extensive computational resources which limits its deployment in advanced CMOS nodes. In this paper, we propose a wavefront-based pixel inversion algorithm to quickly obtain inverse masks with a high aerial image quality. Further assisted by a flexible pattern simplification technique, we present effective SRAF generation and placement based on the calculated inverse mask. The proposed approach can be easily inserted prior to a conventional mask correction flow for subsequent concurrent optimizations of both drawn patterns and SRAFs. The innovative pixel inversion and pattern simplification techniques allow quality mask corrections as produced by inverse lithography while maintaining the convenience of standardized/validated process flows currently used in the industry.

Original languageEnglish
Article number043014
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume10
Issue number4
DOIs
StatePublished - 1 Jan 2011

Keywords

  • Inverse lithography
  • Optical proximity correction
  • Subresolution assist features

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