Very low Vt [Ir-Hf]/HfLaO CMOS using novel self-aligned low temperature shallow junctions

C. F. Cheng, C. H. Wu, N. C. Su, S. J. Wang, S. P. McAlister, Albert Chin

Research output: Contribution to journalConference articlepeer-review

30 Scopus citations

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science