Very high κ and high density TiTaO MIM capacitors for analog and RF applications

K. C. Chiang*, Albert Chin, C. H. Lai, W. J. Chen, C. F. Cheng, B. F. Hung, C. C. Liao

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

43 Scopus citations

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Engineering & Materials Science