Vertical InGaN-based blue light emitting diode with plated metal base fabricated using laser lift-off technique

Tetsuzo Ueda*, Masahiro Ishida, Satoshi Tamura, Yasuhiro Fujimoto, Masaaki Yuri, Takeshi Saito, Daisuke Ueda

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

20 Scopus citations


A vertical InGaN-based blue light emitting diode (LED) with a reflective metal electrode and thick gold plated base free from insulating sapphire is demonstrated. A 50 μm-thick gold plated layer on a highly reflective platinum p-side ohmic contact is formed on the InGaN-based LED epi-structure, followed by irradiation with high power ultra-violet pulsed laser from the backside of the original sapphire substrate. The laser processing, so called laser lift-off technique, enables the separation of sapphire by decomposition of interfacial GaN layer. No transparent electrode is necessary for the LED because the current can spread well through the highly conductive n-GaN layer so that uniform blue light is emitted through the n-GaN layer. The electroluminescence (EL) spectra show small multi peaks due to the resonance within the formed vertical cavity. In addition, the measured thermal resistance of the vertical LED is smaller than that of the conventional LED on poor heat-conductive sapphire. The vertical LED would increase the brightness together with smaller chip size and lower series resistance. This would be advantageous espacially for high power and highly efficient LEDs applicable to future solid state lighting.

Original languageEnglish
Pages (from-to)2219-2222
Number of pages4
JournalPhysica Status Solidi C: Conferences
Issue number7
StatePublished - 1 Dec 2003
Event5th International Conference on Nitride Semiconductors, ICNS 2003 - Nara, Japan
Duration: 25 May 200330 May 2003

Fingerprint Dive into the research topics of 'Vertical InGaN-based blue light emitting diode with plated metal base fabricated using laser lift-off technique'. Together they form a unique fingerprint.

Cite this