Van der Waals epitaxy of functional MoO2 film on mica for flexible electronics

Chun Hao Ma, Jheng Cyuan Lin, Heng Jui Liu, Thi Hien Do, Yuan Min Zhu, Thai Duy Ha, Qian Zhan, Jenh-Yih Juang, Qing He, Elke Arenholz, Po Wen Chiu*, Ying-hao Chu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

58 Scopus citations


Flexible electronics have a great potential to impact consumer electronics and with that our daily life. Currently, no direct growth of epitaxial functional oxides on commercially available flexible substrates is possible. In this study, in order to address this challenge, muscovite, a common layered oxide, is used as a flexible substrate that is chemically similar to typical functional oxides. We fabricated epitaxial MoO 2 films on muscovite via pulsed laser deposition technique. A combination of X-ray diffraction and transmission electron microscopy confirms van der Waals epitaxy of the heterostructures. The electrical transport properties of MoO 2 films are similar to those of the bulk. Flexible or free-standing MoO 2 thin film can be obtained and serve as a template to integrate additional functional oxide layers. Our study demonstrates a remarkable concept to create flexible electronics based on functional oxides.

Original languageEnglish
Article number253104
Number of pages5
JournalApplied Physics Letters
Issue number25
StatePublished - 20 Jun 2016

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