Abstract
This paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an ESI series, to allow mapping of sp2/sp3 ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/α-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the ESI series images has a quality as good as that of conventional electron energy-loss spectra. The L3/L2 ratio of the reconstructed ESI spectrum is determined to be 3.30 ± 0.30 and 5.0 ± 0.30 for Fe and α-Fe2O3, respectively. Our L3/L2 ratio mapping shows an accurate correspondence across the Cu/Fe/α-Fe2O3 region. The effect of delocalization and chromatic aberration on the ESI resolution is discussed and estimated to be about 2 nm for the case of L3/L2 ratio mapping.
Original language | English |
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Pages (from-to) | 354-361 |
Number of pages | 8 |
Journal | Micron |
Volume | 38 |
Issue number | 4 |
DOIs | |
State | Published - 1 Jun 2007 |
Keywords
- Electron energy-loss spectroscopy(EELS)
- Electron spectroscopic imaging(ESI)
- Iron oxide system
- Valence state map