VA-7 Self-Aligned Substitutional Emitter Process for GaAs/(GaAl)As Heterojunction Bipolar Transistors

Mau-Chung Chang, P. M. Asbeck, D. L. Miller, K. C. Wang

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Number of pages1
JournalIEEE Transactions on Electron Devices
Volume32
Issue number11
DOIs
StatePublished - 1 Jan 1985

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