Using femtosecond laser to fabricate the interior 3D structures of polymeric microfluidic biochips

Chia Yu Lee, Ting Chou Chang, Shau Chun Wang*, Chih Wei Chien, Chung-Wei Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


We have successfully employed femtosecond laser to craft microstructures on polymeric substrate to imbed micro-mixiers. Since the laser pulse is ultra-short, the heat affected zone is not significant. Therefore the thermal melting damage is not as severe as that using continuous carbon dioxide laser. As a result, using femtosecond laser the fabrications of reproducible and defined micro-structures are able to accomplish. These structures can be used to generate micro-vortices using the mechanisms of induced electro-osmosis, one unique technique developed in our laboratory. The dimensional reproducibility of microstructures was observed with scanning electron microscopy. In addition, using attenuation total reflectance Fourier transform infrared spectroscopy (ATR-FTIR) to inspect the laser fabricated surface of polymeric substrate, we have acquired the spectrum of polymer moieties showing that photothermal effects are also more pronounced than photochemical effects in the fabrication processes to avoid surface reactions. An example of a micro-mixer with three dimensional microstructures about 800 μm x 400 μm x 65 μm on the last slide for transparent glycerol and glycerol with red dyes mixing is presented.

Original languageEnglish
Pages (from-to)87-90
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Issue number1
StatePublished - 1 Mar 2011


  • Femtosecond laser
  • Microstructures
  • PMMA

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