Uniaxial-biaxial stress hybridization for super-critical strained-Si directly on insulator (SC-SSOI) PMOS with different channel orientations

A. V.Y. Thean*, L. Prabhu, V. Vartanian, M. Ramon, B. Y. Nguyen, T. White, H. Collard, Q. H. Xie, S. Murphy, J. Cheek, S. Venkatesan, J. Mogab, C. H. Chang, Y. H. Chiu, H. C. Tuan, Y. C. See, M. S. Liang, Y. C. Sun

*Corresponding author for this work

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science