Ultrathin, ultrasmooth, and low-loss silver films via wetting and annealing

W. Chen*, Kuo-Ping Chen, M. D. Thoreson, A. V. Kildishev, V. M. Shalaev

*Corresponding author for this work

Research output: Contribution to journalArticle

45 Scopus citations

Abstract

We have demonstrated that a thermal annealing treatment can reduce the optical losses in ultrathin, ultrasmooth, silver films deposited on a Ge wetting layer to values as low as the bulk material value and at the same time maintain an ultrasmooth surface. The annealing effect is sensitive to the annealing temperature and time, both of which should be carefully controlled. This annealing treatment is also effective for Ag-Si O2 multilayer composite films.

Original languageEnglish
Article number211107
JournalApplied Physics Letters
Volume97
Issue number21
DOIs
StatePublished - 22 Nov 2010

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