Ultrathin glass wafer lamination and laser debonding to enable glass interposer fabrication

Wen Wei Shen, Hsiang Hung Chang, Jen Chun Wang, Cheng Ta Ko, Leon Tsai, Bor Kai Wang, Aric Shorey, Alvin Lee, Jay Su, Dongshun Bai, Baron Huang, Wei Chung Lo, Kuan-Neng Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Interposer fabrication processes are applied in three-dimensional (3-D) integrated circuit (IC) integration to shorten the interconnection among different stacked chips and substrates. Because Si is a common material in semiconductor technology, Si interposers have been widely studied in many research activities. Compared with a Si wafer, glass substrates have the advantages of high resistivity, low dielectric constant, low insertion loss, adjustable coefficient of thermal expansion (CTE), and the possibility to use panel-size substrates as well as thin glass substrates (100 μm) to avoid the costly thinning process for realization of low-cost 2.5-D ICs. Thus, glass interposer fabrication is studied thoroughly in this paper. Thin glass wafers have reduced mechanical stiffness. Therefore, handling and shipping thin glass wafers (δ 100 μm) throughout the semiconductor fabrication and packaging assembly processes are critical. Temporary wafer bonding technology is used in this study to bond a thin glass wafer to a carrier to improve the rigidity. Vacuum lamination technology is used in this study as a bonding process to enhance the costeffectiveness. After processing, the carrier is removed by laser debonding. The thin glass wafer with structures on both sides does not need to undergo a glass thinning process and saves a lot of cost compared to the traditional glass or Si interposer processes. Thin 300-mm glass wafers 100 μm thick are evaluated as: (a) blank thin glass wafers and (b) thin glass wafers with through-glass vias (TGVs) 30 μm in diameter. A UV laser with a wavelength of 308 nm, which has the benefit of less impact to the device, was adopted to laser debonding. This method also has several benefits such as high throughput, low temperature, zero-force debonding, and possible selective laser debonding. Adhesive and release layers are key enabling materials for thin glass handling. In addition, the use of a laminator for temporary bonding and laser debonding are included in this study. Based on the excellent fabrication, the thin glass interposer has great potential to be applied in 2.5-D integration applications.

Original languageEnglish
Title of host publication2015 IEEE 65th Electronic Components and Technology Conference, ECTC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1652-1657
Number of pages6
ISBN (Electronic)9781479986095
DOIs
StatePublished - 15 Jul 2015
Event2015 65th IEEE Electronic Components and Technology Conference, ECTC 2015 - San Diego, United States
Duration: 26 May 201529 May 2015

Publication series

NameProceedings - Electronic Components and Technology Conference
Volume2015-July
ISSN (Print)0569-5503

Conference

Conference2015 65th IEEE Electronic Components and Technology Conference, ECTC 2015
CountryUnited States
CitySan Diego
Period26/05/1529/05/15

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