Ultrathin gate oxide CMOS on (111) surface-oriented Si substrate

Hisayo Sasaki Momose*, Tatsuya Ohguro, Shin Ichi Nakamura, Yoshiaki Toyoshima, Hidemi Ishiuchi, Hiroshi Iwai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

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Chemical Compounds

Engineering & Materials Science