Ultrasensitive detection of avian influenza virus by using CMOS impedimetric sensor arrays

Wei An Lai, Chih Heng Lin, Yuh-Shyong Yang, Michael S.C. Lu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This work presents miniaturized CMOS (complementary metal oxide semiconductor) impedimetric sensors for detection of avian influenza virus (AIV) in the femtomolar level. The sensing resolution is significantly enhanced owing to monolithic sensor integration to reduce the parasitic effect and the use of sub-μm interdigitated microelectrodes to promote signal coupling efficiency. The 4x4 sensor array contains four electrode designs of different sizes. Capacitance changes associated with surface modification, functionalization, and DNA hybridization were extracted from measured frequency responses based on an equivalent circuit. Hybridization of AIV H5 capture and target DNA produced a percentage capacitance change of -12.8±3% among the four designs for target DNA concentrations from 1 fM to 10 fM, while capacitance increases were observed for non-specific binding of the H5 and H7 DNA probes.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages894-897
Number of pages4
DOIs
StatePublished - 7 May 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period29/01/122/02/12

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    Lai, W. A., Lin, C. H., Yang, Y-S., & Lu, M. S. C. (2012). Ultrasensitive detection of avian influenza virus by using CMOS impedimetric sensor arrays. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 894-897). [6170329] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170329