Ultra shallow P+/N junctions fabricated by plasma doping and all solid state laser annealing

Kazuo Tsutsui*, Yuichiro Sasaki, Cheng Guo Jin, Hideki Tamura, Buji Mizuno, Ryota Higaki, Takahisa Sato, Kenta Majima, Shun Ichiro Ohmi, Hiroshi Iwai

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

3 Scopus citations

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Engineering & Materials Science