Two-photon photographic production of three-dimensional metallic structures within a dielectric matrix

Pu-Wei Wu, Wei Cheng, Ignacio B. Martini, Bruce Dunn, Benjamin J. Schwartz, Eli Yablonovitch

Research output: Contribution to journalArticle

81 Scopus citations

Abstract

The lithographic fabrication of a three-dimensional metallic structure based on a three-step photographic-type approach is demonstrated. First, a three-dimensional latent image is created by multiphoton exposure to femtosecond laser radiation. During a second development process, this image becomes a three-dimensional structure. A final fixing step retains the object.

Original languageEnglish
Pages (from-to)1438-1441
Number of pages4
JournalAdvanced Materials
Volume12
Issue number19
DOIs
StatePublished - 2 Oct 2000

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