Two-dimensional designed fabrication of subwavelength grating HCG mirror on silicon-on-insulator

Shen Che Huang, Kuo Bin Hong, Tien-chang Lu, Sailing He

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.

Original languageEnglish
Title of host publicationHigh Contrast Metastructures V
EditorsDavid Fattal, Connie J. Chang-Hasnain, Weimin Zhou, Fumio Koyama
PublisherSPIE
ISBN (Electronic)9781628419924
DOIs
StatePublished - 1 Jan 2016
EventHigh Contrast Metastructures V - San Francisco, United States
Duration: 17 Feb 201618 Feb 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9757
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceHigh Contrast Metastructures V
CountryUnited States
CitySan Francisco
Period17/02/1618/02/16

Keywords

  • HCG
  • silicon-on-insulator
  • subwavelength grating

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