Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

Jui Che Tsai*, Sheng Jie Chiou, Tien Liang Hsieh, Chia-Wei Sun, Dooyoung Hah, Ming C. Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

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Physics & Astronomy

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Engineering & Materials Science