Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

Jui Che Tsai*, Sheng Jie Chiou, Tien Liang Hsieh, Chia-Wei Sun, Dooyoung Hah, Ming C. Wu

*Corresponding author for this work

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.

Original languageEnglish
Article number044006
JournalJournal of Optics A: Pure and Applied Optics
Volume10
Issue number4
DOIs
StatePublished - 1 Apr 2008

Keywords

  • Radial combdrive actuators
  • Small form factor
  • Surface micromachining
  • Two-axis scanner

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