TRIAD: A triple patterning lithography aware detailed router

Yen Hung Lin*, Bei Yu, David Z. Pan, Yih-Lang Li

*Corresponding author for this work

Research output: Contribution to journalConference article

35 Scopus citations

Abstract

TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.

Original languageEnglish
Article number6386598
Pages (from-to)123-129
Number of pages7
JournalIEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
DOIs
StatePublished - 1 Dec 2012
Event2012 30th IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2012 - San Jose, CA, United States
Duration: 5 Nov 20128 Nov 2012

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