Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation

Walter Den, Fu-Hsiang Ko, Tiao Yuan Huang

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17 Scopus citations


This study investigates the feasibility of using a two-stage process combining a photochemical oxidation process (UV/H2O2) and a biological fluidized-bed system to treat dilute-organic wastewater discharged from semiconductor manufacturing facilities. This combined process has the merits of decomposing recalcitrant organic chemicals into intermediate products more amenable to biodegradation, thereby achieving high degree of mineralization of organic compounds that are otherwise toxic to aerobic biodegradation. Six organic solvents, including propylene glycol methyl ether acetate, ethyl lactate, tetramethylammonium hydroxide, 1-methyl-2-pyrrolidone, isopropanol, and phenol, were evaluated due to their common applications in various wafer fabrication processes. The optimal operating conditions (H2O2 dosage, pH, exposure time) for the first-stage UV/H2O2 were determined for each chemical, and a nominal condition was selected for the ensuing biodegradation experiments. GC/MS analyses demonstrated that UV/H2O2 indeed decomposed the chemicals into smaller fragments that could be effectively mineralized by aerobic biodegradation. Excellent reduction efficiencies (>95%) in both TOC and compound concentration were achieved for all compounds except for NMP, whose stable ring structure was refractory to both low-dosage UV/H2O2 oxidation and biodegradation. No significant difference in reduction efficiencies was observed between treatment of the compounds as individual components and as a mixture, suggesting the favorable applicability of the proposed technology.

Original languageEnglish
Pages (from-to)540-551
Number of pages12
JournalIEEE Transactions on Semiconductor Manufacturing
Issue number4
StatePublished - 1 Jan 2002


  • Advanced oxidation processes
  • Biodegradation
  • Microelectronics
  • Organic wastewater
  • Photochemical intermediates
  • Ultraviolet oxidation

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