Transparent amorphous oxide semiconductors for system on panel applications

Po-Tsun Liu, Li Wei Chu, Li Feng Teng, Yang Shun Fan, Chur Shyang Fuh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

We demonstrate the applications of amorphous InGaZnO thin film transistor (a- IGZO TFT), extended from the pixel switcher/current driver, gate driver on array (GOA) to resistive random access memory (RRAM) technologies for system-on-panels (SoPs). The high-performance IGZO TFT with mobility of 13.5 cm2/Vs is proposed by microwave annealing process at room temperature only for 100 sec. Furthermore, an integrated gate driver scheme with the a-IGZO TFT as backbone is demonstrated in comparison with the amorphous Si TFT backplane. The rise and fall time of a-IGZO gate driver circuits is shorter than that of a-Si TFT gate driver. In addition, the ASK demodulator with a-IGZO TFT is realized successfully, and potentially to be applied for the system of low-frequency RFID tag. The study on a-IGZO RRAM reveals excellent reliability including 1000 times DC sweep endurance, 104 pulse endurance, 104 s data retention with read disturb immunity. The flexibility of a-IGZO RRAM device is also examined for flexible electronics applications.

Original languageEnglish
Title of host publicationThin Film Transistors 11, TFT 2012
Pages257-268
Number of pages12
Edition8
DOIs
StatePublished - 1 Dec 2012
Event11th Symposium on Thin Film Transistor Technologies, TFT 2012 - PRiME 2012 - Honolulu, HI, United States
Duration: 8 Oct 201210 Oct 2012

Publication series

NameECS Transactions
Number8
Volume50
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference11th Symposium on Thin Film Transistor Technologies, TFT 2012 - PRiME 2012
CountryUnited States
CityHonolulu, HI
Period8/10/1210/10/12

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  • Cite this

    Liu, P-T., Chu, L. W., Teng, L. F., Fan, Y. S., & Fuh, C. S. (2012). Transparent amorphous oxide semiconductors for system on panel applications. In Thin Film Transistors 11, TFT 2012 (8 ed., pp. 257-268). (ECS Transactions; Vol. 50, No. 8). https://doi.org/10.1149/05008.0257ecst