A touch mode capacitive pressure sensor with special ring structure for planar connections and sensitivity optimization is presented. The sensor is designed to operate in the pressure range where the diaphragm is touching the bottom with a thin glass layer. The sensitivity of 0.21 pF/psi of the sensor can be obtained in the pressure range 25 psi to 40 psi. The sensor offers the advantages of simple fabrication process, planar connections, as well as high sensitivity, linear output, and large over range pressure.
|Number of pages||7|
|Journal||Journal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an|
|State||Published - 1 Nov 1998|