Touch mode capacitive pressure sensor with special ring structure

Kow-Ming Chang*, Gwo Jen Hwang, Yeou Lang Hsieh, Wen H. Ko

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

A touch mode capacitive pressure sensor with special ring structure for planar connections and sensitivity optimization is presented. The sensor is designed to operate in the pressure range where the diaphragm is touching the bottom with a thin glass layer. The sensitivity of 0.21 pF/psi of the sensor can be obtained in the pressure range 25 psi to 40 psi. The sensor offers the advantages of simple fabrication process, planar connections, as well as high sensitivity, linear output, and large over range pressure.

Original languageEnglish
Pages (from-to)305-311
Number of pages7
JournalJournal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an
Volume5
Issue number4
StatePublished - 1 Nov 1998

Fingerprint Dive into the research topics of 'Touch mode capacitive pressure sensor with special ring structure'. Together they form a unique fingerprint.

  • Cite this